UltraSOLV® Scrub PAD

Description

UltraSOLV® Scrub PAD SIC

Reduces contamination from equipment.
Vacuum Chamber UltraSOLV® Scrub PADS are patented scrubbing tools for use in PM procedures on process equipment in wafer fab, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers. UltraSOLV® Scrub PADS, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.

UltraSOLV® Scrub PAD AIO / DIA

Abrasives for maintenance of vacuum device.
Vacuum Chamber UltraSOLV® Scrub PADS are patented scrubbing tools for use in PM procedures on process equipment in wafer fab, flat panel display, optical component and hard disk drive industries. The availability of various sized diamond, silicon carbide and aluminum oxide abrasives allow for safe and efficient scrubbing of the most difficult to clean process chambers. UltraSOLV® Scrub PADS, used in conjunction with UltraSOLV® Sponges, Wipers, and Swabs, reduce cleaning times, pump down times and contamination levels for critical process tools.